JOB DESCRIPTION
Principal Systems Engineer, Platform Robotics & Vacuum Architecture
- Serve as the system-level technical owner for robotics, wafer handling, and vacuum-platform architecture across existing and next-generation Axcelis equipment.
- Translate product and customer needs into system requirements and architecture, lead cross-disciplinary trade studies, and drive integration and verification of mechanical, electrical, controls, software, safety, and vacuum subsystems.
Role and Responsibilities:
- Own platform architecture for wafer handling, robotics, vacuum, chamber interfaces, and equipment automation
- Convert product needs and use cases into requirements, interface definitions, performance budgets, and verification plans
- Lead architecture trades involving throughput, wafer safety, particle performance, reliability, serviceability, cost, and platform reuse
- Lead system integration and root-cause investigations on real hardware
- Define and execute subsystem and system-level characterization, including motion accuracy, repeatability, vibration, vacuum recovery, fault handling, and wafer-transfer robustness
- Partner with mechanical, electrical, software, controls, process, reliability, manufacturing, and field engineering
- Guide supplier technical decisions involving robots, load ports, valves, pumps, gauges, motion components, sensors, and controls
- Support NPI from concept through verification, production readiness, initial field introduction, and transfer to volume manufacturing
- Establish reusable platform requirements and design rules across Purion product lines
- Mentor engineers in systems thinking, interface management, technical trade studies, and verification strategy
Required Qualifications:
- BS in Mechanical, Electrical, Mechatronics, Robotics, Systems Engineering, or a related discipline
- 7+ years developing complex electromechanical equipment, or an advanced degree plus 5+ years
- Hands-on experience with at least one of:
- Semiconductor or vacuum-process equipment
- Industrial robotics or precision wafer/material handling
- Complex motion-control or factory-automation systems
- Experience translating product needs into system architecture, requirements, interfaces, and verification
- Demonstrated integration and troubleshooting across mechanical, electrical, software, controls, and sensor systems
- Experience leading technical trade studies and design reviews
- Strong experimental, data-analysis, and technical-communication skills
Preferred Qualifications:
- Vacuum pumps, valves, gauges, conductance, pressure transients, leak checking, and vacuum-control sequences
- SCARA or articulated robot integration
- Servo systems, trajectory generation, vibration, kinematics, and motion characterization
- EtherCAT, PLCs, embedded/real-time controls, or industrial networks
- LabView, Python, and/or MATLAB for data analysis and test automation
- Semiconductor equipment and wafer-handling experience
- Reliability analysis, FMEA, fault trees, DOE, and system verification
- Creo or equivalent 3D CAD literacy
- SEMI S2 and relevant equipment-safety experience
U.S. BASE SALARY RANGE
$130,879.92 - $196,319.88
This base salary range reflects the typical compensation for this role across U.S. locations.
Our salary ranges are determined by role and level; individual pay is determined based on
multiple factors, including job-related skills, experience, relevant education or training, work
location, and internal equity. The range provides the opportunity for growth and progression as
you develop within the role.
Base pay is one part of our U.S. total compensation package which includes eligibility in the
Axcelis Team Incentive bonus plan, and comprehensive benefits package (for regular
employees working 20+ hours a week).