Job Summary & Responsibilities
Role summary
FEO is creating a Common EFEM (Equipment Front-End Module) platform that can be used across multiple Onto tools. We are hiring a Senior Systems Engineer to lead system-level definition and integration of the EFEM platform.
You will own system requirements and interfaces, system architecture, integration planning, and system-level validation. The work spans robotics, FOUP load ports, sensors, motion systems, environmental controls, safety, and control software.
- You often won’t have complete information. You should be able to state assumptions, identify risks, and choose tests that reduce uncertainty.
- Problems are usually harder than they look. You should expect iteration and plan for it.
- Progress is measured by results: a working integration, validated performance, reduced risk, and clear interfaces that teams can adopt.
- Clear thinking and clear communication are required. This role involves trade-offs and alignment across teams.
Responsibilities
System definition and architecture
- Define EFEM system requirements, functional specs, and interface definitions for use across multiple product families.
- Develop system architecture, module boundaries, and integration plans for:
- robotics and wafer handling
- FOUP load ports and related sensors
- motion and precision positioning
- lighting and sensing subsystems
- airflow / environmental controls
- safety systems
- control software
- Set platform-level standards so the EFEM can be configured and reused without rework.
Integration leadership
- Lead integration across mechanical, electrical, software, robotics, and controls.
- Work with SMEs across robotics, motion control, safety, PCBA design, optics, and software controls to resolve interface and behavior issues.
- Define system-level metrics and acceptance criteria (throughput, placement accuracy, wafer flow reliability, environmental stability, contamination control).
Characterization and validation
- Create and execute system-level test plans for modules and integrated builds.
- Analyze data to find performance gaps (motion precision, handling reliability, vibration, thermal/environmental behavior, sensor performance).
- Drive root cause analysis and coordinate corrective actions across teams.
Standards and factory automation
- Ensure compliance with relevant SEMI standards (e.g., E84, E87, E90, E10, S2, S8) and EFEM automation requirements.
- Support interface specifications for AMHS, factory automation, and host control.
- Produce documentation needed for adoption: architecture notes, interface specs, test methods, and performance requirements.
Collaboration and technical leadership
- Work with product teams, NPI, and FEO module owners to ensure the platform fits multiple tool architectures.
- Present system behavior, trade-offs, risks, and design decisions to engineering and leadership.
- Mentor engineers on integration discipline, validation practices, and systems thinking.
Qualifications
Required
- BS or MS in Systems Engineering, Mechanical Engineering, Electrical Engineering, Robotics, Mechatronics, or related field.
- 8+ years in semiconductor capital equipment, robotics, mechatronics, precision automation, or other multidisciplinary systems.
- Experience defining system architecture, interfaces, and requirements for complex systems.
- Experience integrating robotics, precision motion, sensors, and controls into a working system.
- Familiarity with SEMI standards and factory automation interfaces used with EFEMs.
- Strong problem-solving skills using data, structured debugging, and clear written documentation.
Preferred
- Direct EFEM development experience (wafer-handling robotics, load ports, automation).
- Knowledge of contamination control, airflow management, environmental stability, and vibration mitigation.
- Experience with reliability methods (FMEA, structured root cause analysis) and platform engineering.
- Python, MATLAB, or similar tools for data analysis.
Why Join Onto Innovation?
At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized.
Compensation & Growth
• Base Salary Range:
$115,200.00 - $172,800.00, offered in good faith and based on experience, location, and qualifications.
